Oxidation Conditions for Octadecyl Trichlorosilane Monolayers on Silicon: A Detailed Atomic Force Microscopy Study of the Effects of Pulse Height and Duration on the Oxidation of the Monolayers and the Underlying Si Substrate

Wouters, Daan; Willems, Ron; Höppener, Stephanie; Flipse, Cees F. J.; Schubert, Ulrich S.

Year:

2005

Type of Publication:

Article

Journal:

Advanced Functional Materials

Volume:

15

Pages:

938 - 944