Large-scale local probe oxidation of OTS monolayers
-
Wouters, Daan; Schubert, Ulrich S.
- Abstract:
- A broad variety of functional structures with nanometer dimensions can be
produced by combining the local probe oxidation of octadecyl trichlorosilane
(OTS) self-assembled monolayers on silicon and suitable chemical
modification and self-assembly methods. However, local probe-based
patterning methods are inherently slow and, due to the small areas that are
addressed, spectroscopic characterization is difficult. Here we report on the
possibility of creating large-scale surface patterns by electro-oxidation using
both an automated oxidation setup and conductive parallel cantilever arrays.
This enables large-scale surface pattering while retaining the high resolution
and freedom of (sequential) pattern formation, which would be lost if
macroscopic patterned stamps were applied as electrodes.
- Year:
- 2007
- Type of Publication:
- Article
- Journal:
- Nanotechnology
- Volume:
- 18
- Pages:
- 485306/1 - 485306/7