Oxidation Conditions for Octadecyl Trichlorosilane Monolayers on Silicon: A Detailed Atomic Force Microscopy Study of the Effects of Pulse Height and Duration on the Oxidation of the Monolayers and the Underlying Si Substrate
- Wouters, Daan; Willems, Ron; Höppener, Stephanie; Flipse, Cees F. J.; Schubert, Ulrich S.
- Year:
- 2005
- Type of Publication:
- Article
- Journal:
- Advanced Functional Materials
- Volume:
- 15
- Pages:
- 938 - 944