Fabrication of Ring Structures by Anodization Lithography on Self-assembles OTS Monolayers
-
Druzhinina, Tamara S.; Höppener, Stephanie; Herzer, Nicole; Schubert, Ulrich S.
- Abstract:
- A new and rational fabrication concept to obtain ring structures with
nanometer dimensions is presented that utilizes a combination of
anodization and electrochemical oxidation lithography on a selfassembled
monolayer of n-octadecyltrichlorosilane performed with
an electrically biased scanning force microscopy tip. During the
oxidation process two different chemical areas are created; a silicon
oxide core which is surrounded by a chemically active, acid functionalized
rim feature. The oxidation conditions, as well as the
scaling options of this lithographic process have been investigated
and revealed good controllability of the ring dimensions. A
straightforward electroless metal deposition process was used to
convert the ring structures into metal features.
- Year:
- 2011
- Type of Publication:
- Article
- Journal:
- Journal of Materials Chemistry
- Volume:
- 21
- Pages:
- 8532 - 8536