New Design Concepts for the Fabrication of Nanometric Gap Structures - Electrochemical Oxidation of OTS Mono- and Bilayer Structures

Druzhinina, Tamara S.; Höppener, Stephanie; Schubert, Ulrich S.
Abstract:
A reliable nanofabrication concept to engineer metallic nanometric gap structures and to incorporate silver nanoparticles within the gaps utilizing a combination of self-assembly strategies and electrochemical oxidation lithography is developed. The approach uses the differences in oxidation kinetics of n-octadecyltrichlorosilane (OTS) monolayer and bilayer structures. The processes are investigated in detail and form the basis for a new nanofabrication process.
Year:
2012
Type of Publication:
Article
Keywords:
electrochemical oxidation lithography; OTS; nanofabrication; self-assembled monolayers; gap structures
Journal:
Small
Volume:
8
Pages:
852-857