New Design Concepts for the Fabrication of Nanometric Gap Structures - Electrochemical Oxidation of OTS Mono- and Bilayer Structures
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Druzhinina, Tamara S.; Höppener, Stephanie; Schubert, Ulrich S.
- Abstract:
- A reliable nanofabrication concept to engineer metallic nanometric gap structures and to incorporate silver nanoparticles within the gaps utilizing a combination of self-assembly strategies and electrochemical oxidation lithography is developed. The approach uses the differences in oxidation kinetics of n-octadecyltrichlorosilane (OTS) monolayer and bilayer structures. The processes are investigated in detail and form the basis for a new nanofabrication process.
- Year:
- 2012
- Type of Publication:
- Article
- Keywords:
- electrochemical oxidation lithography; OTS; nanofabrication; self-assembled monolayers; gap structures
- Journal:
- Small
- Volume:
- 8
- Pages:
- 852-857